中文簡介

IEEE《半導體制造學報》發(fā)表了與微電子和光子元件及集成系統(tǒng)(包括光伏器件和微電子機械系統(tǒng))制造有關的最新進展。其主要目標是不斷增強知識基礎和改善整個供應鏈的制造實踐，從制造到交付這些設備。感興趣的領域包括過程集成、制造設備性能和建模、產(chǎn)量分析和增強、計量學、過程控制、材料處理、工廠系統(tǒng)以及與半導體行業(yè)相關的所有工廠和供應鏈管理領域，包括材料合成、設備制造和掩模制造。提交給本雜志的論文應該與制造實踐有明確的相關性，而不是設備設計和設備特性。

　　英文簡介

The IEEE Transactions on Semiconductor Manufacturing publishes the latest advances related to the manufacture of microelectronic and photonic components and integrated systems, including photovoltaic devices and micro-electro-mechanical systems. Its principal aim is to continually enhance the knowledge base and improve manufacturing practice across the entire supply chain from fabrication to delivery of these devices. Areas of interest include process integration, manufacturing equipment performance and modeling, yield analysis and enhancement, metrology, process control, material handling, factory systems and all areas of factory and supply chain management related to the semiconductor industry including materials synthesis, equipment manufacturing, and mask making. Papers submitted to this journal should have a clear relevance to manufacturing practice, as opposed to device design and device characterization.

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